Search Results for author: Martin D. F. Wong

Found 3 papers, 0 papers with code

Physics-Informed Optical Kernel Regression Using Complex-valued Neural Fields

no code implementations15 Mar 2023 Guojin Chen, Zehua Pei, HaoYu Yang, Yuzhe ma, Bei Yu, Martin D. F. Wong

Lithography is fundamental to integrated circuit fabrication, necessitating large computation overhead.

regression

AdaOPC: A Self-Adaptive Mask Optimization Framework For Real Design Patterns

no code implementations15 Mar 2023 Wenqian Zhao, Xufeng Yao, Ziyang Yu, Guojin Chen, Yuzhe ma, Bei Yu, Martin D. F. Wong

We inspect the pattern distribution on a design layer and find that different sub-regions have different pattern complexity.

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