Diagnosis of electron density and temperature by using collisional radiative model in capacitively coupled Ar plasmas I: triple-frequency discharges

no code implementations • 21 Oct 2020 • Hao Zheng, Jidun Wu, Qilu Cao, Jiaojiao Zhang, Xiaojiang Huang

Compared with the dual-frequency (DF) CCPs, it is found that with the increase of IF power, the HF power can control the electron density more independently with less influence on the electron temperature.

Plasma Physics