Fine-tuned pre-trained language models can suffer from severe miscalibration for both in-distribution and out-of-distribution (OOD) data due to over-parameterization. To mitigate this issue, we propose a regularized fine-tuning method. Our method introduces two types of regularization for better calibration: (1) On-manifold regularization, which generates pseudo on-manifold samples through interpolation within the data manifold. Augmented training with these pseudo samples imposes a smoothness regularization to improve in-distribution calibration. (2) Off-manifold regularization, which encourages the model to output uniform distributions for pseudo off-manifold samples to address the over-confidence issue for OOD data. Our experiments demonstrate that the proposed method outperforms existing calibration methods for text classification in terms of expectation calibration error, misclassification detection, and OOD detection on six datasets. Our code can be found at https://github.com/Lingkai-Kong/Calibrated-BERT-Fine-Tuning.