Sparsity-Based Super Resolution for SEM Images

29 Aug 2017Shahar TsiperOr DickerIdan KaizermanZeev ZoharMordechai SegevYonina C. Eldar

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the surface topography and composition... (read more)

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