Keeping Deep Lithography Simulators Updated: Global-Local Shape-Based Novelty Detection and Active Learning

no code implementations • 24 Jan 2022 • Hao-Chiang Shao, Hsing-Lei Ping, Kuo-shiuan Chen, Weng-Tai Su, Chia-Wen Lin, Shao-Yun Fang, Pin-Yian Tsai, Yan-Hsiu Liu

To address the problem, we propose a deep learning-based layout novelty detection scheme to identify novel (unseen) layout patterns, which cannot be well predicted by a pre-trained pre-simulation model.

Active Learning Novelty Detection