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Found 4 papers, 1 papers with code
Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission
Here, we report the design and implementation of an autonomous workflow for sputter deposition of thin films with controlled composition, leveraging a highly automated sputtering reactor custom-controlled by Python, optical emission spectroscopy (OES), and a Bayesian optimization algorithm.
Gallium Oxide Heterojunction Diodes for Improved High-Temperature Performance
${\beta}$-Ga${_2}$O${_3}$ based semiconductor devices are expected to have significantly improved high-power and high-temperature performance due to its ultra-wide bandgap of close to 5 eV.
Improving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry
This in-situ technique uses changes in the Ar(I) and N2(I) emission lines of the glow discharge during growth to identify films that subsequently exhibit unacceptable structural and electrical performance.
Materials Science
A Map of the Inorganic Ternary Metal Nitrides
Exploratory synthesis in novel chemical spaces is the essence of solid-state chemistry.
Materials Science
