Search Results for author: M. Prescher

Found 1 papers, 0 papers with code

Quality assessment of in situ plasma etched diamond surfaces for CVD overgrowth

no code implementations19 Jan 2021 J. Langer, V. Cimalla, M. Prescher, J. Ligl, B. Tegetmeyer, C. Schreyvogel, O. Ambacher

We propose an optimization of the pretreatment process on grounds of high-resolution X-ray diffraction measurements to judge the structural quality gain of the diamond substrates and the effectiveness of the polishing-induced subsurface damage removal.

Materials Science

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