no code implementations • 12 Mar 2022 • HaoYu Yang, Zongyi Li, Kumara Sastry, Saumyadip Mukhopadhyay, Mark Kilgard, Anima Anandkumar, Brucek Khailany, Vivek Singh, Haoxing Ren
Lithography simulation is a critical step in VLSI design and optimization for manufacturability.