no code implementations • 23 Feb 2022 • Xuanyi Zhao, Onurcan Kaya, Michele Pirro, Meruyert Assylbekova, Luca Colombo, Pietro Simeoni, Cristian Cassella
This work reports on the measured performance of an Aluminum Scandium Nitride (AlScN) Two-Dimensional Resonant Rods resonator (2DRR), fabricated by using a Sc-doping concentration of 24%, characterized by a low off-resonance impedance (~25 Ohm) and exhibiting a record electromechanical coupling coefficient (kt2) of 23. 9% for AlScN resonators.