Scandium Aluminum Nitride Overmoded Bulk Acoustic Resonators for Future Wireless Communication

no code implementations • 23 Apr 2024 • Walter Gubinelli, Pietro Simeoni, Ryan Tetro, Luca Colombo, Matteo Rinaldi

This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) for high-frequency Radio Frequency (RF) applications, notably in 5G technology and beyond.

Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes

no code implementations • 22 Nov 2023 • Sinwoo Cho, Omar Barrera, Pietro Simeoni, Ellie Y. Wang, Jack Kramer, Vakhtang Chulukhadze, Joshua Campbell, Matteo Rinaldi, Ruochen Lu

This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes.

Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride

no code implementations • 6 Sep 2023 • Sinwoo Cho, Omar Barrera, Pietro Simeoni, Emily N. Marshall, Jack Kramer, Keisuke Motoki, Tzu-Hsuan Hsu, Vakhtang Chulukhadze, Matteo Rinaldi, W. Alan Doolittle, Ruochen Lu

This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN).

X-Ray Diffraction (XRD)

A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator with a kt2 of 23.9%

no code implementations • 23 Feb 2022 • Xuanyi Zhao, Onurcan Kaya, Michele Pirro, Meruyert Assylbekova, Luca Colombo, Pietro Simeoni, Cristian Cassella

This work reports on the measured performance of an Aluminum Scandium Nitride (AlScN) Two-Dimensional Resonant Rods resonator (2DRR), fabricated by using a Sc-doping concentration of 24%, characterized by a low off-resonance impedance (~25 Ohm) and exhibiting a record electromechanical coupling coefficient (kt2) of 23. 9% for AlScN resonators.