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Wavelength-multiplexed Multi-mode EUV Reflection Ptychography based on Automatic-Differentiation
Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising candidate for the next-generation metrology solutions in the semiconductor industry, as it can image wafer samples in reflection geometry at the nanoscale.
Noise-robust latent vector reconstruction in ptychography using deep generative models
In this paper, we harness this dimensionality reduction capability of autoencoders to search for the object solution within the latent space rather than the object space.
Maximum-likelihood estimation in ptychography in the presence of Poisson-Gaussian noise statistics
Optical measurements often exhibit mixed Poisson-Gaussian noise statistics, which hampers image quality, particularly under low signal-to-noise ratio (SNR) conditions.
Sensor fusion in ptychography
Ptychography is a lensless, computational imaging method that utilises diffraction patterns to determine the amplitude and phase of an object.
Efficient and flexible approach to ptychography using an optimization framework based on automatic differentiation
Ptychography is a lensless imaging method that allows for wavefront sensing and phase-sensitive microscopy from a set of diffraction patterns.
