no code implementations • 9 May 2024 • Ryan Tetro, Luca Colombo, Matteo Rinaldi
This work presents the design, fabrication, and testing of X-Cut Lithium Niobate (LN) acoustic nanoelectromechanical (NEMS) Laterally Vibrating Resonators (LVRs) and Degenerate LVRs (d-LVRs) operating in the S0 (YZ30) and SH0 (YZ-10) modes between 2 to 16 GHz range, monolithically fabricated on a single chip.
no code implementations • 23 Apr 2024 • Walter Gubinelli, Pietro Simeoni, Ryan Tetro, Luca Colombo, Matteo Rinaldi
This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) for high-frequency Radio Frequency (RF) applications, notably in 5G technology and beyond.
