no code implementations • 22 Nov 2023 • Sinwoo Cho, Omar Barrera, Pietro Simeoni, Ellie Y. Wang, Jack Kramer, Vakhtang Chulukhadze, Joshua Campbell, Matteo Rinaldi, Ruochen Lu
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes.
