no code implementations • 26 Feb 2024 • Tzu-Hsuan Hsu, Joshua Campbell, Jack Kramer, Sinwoo Cho, Ming-Huang Li, Ruochen Lu
In this work, we demonstrate a C-band shear-horizontal surface acoustic wave (SH-SAW) resonator with high electromechanical coupling (keff2) of 22% and a quality factor (Q) of 565 based on a thin-film lithium niobate (LN) on silicon carbide (SiC) platform, featuring an excellent figure-of-merit (FoM = keff2*Q ) of 124 at 6. 5 GHz, the highest FoM reported in this frequency range.
no code implementations • 18 Feb 2024 • Tzu-Hsuan Hsu, Joshua Campbell, Jack Kramer, Sinwoo Cho, Zhi-Qiang Lee, Ming-Huang Li, Ruochen Lu
The optimized LNOI SH-SAW with a {\lambda} of 400 nm exhibits a fs of 9. 05 GHz, a keff2 of 15%, Qmax of 213 and a FoM of 32, which indicates a successful implementation for device targeting centimeter bands.
no code implementations • 22 Nov 2023 • Sinwoo Cho, Omar Barrera, Pietro Simeoni, Ellie Y. Wang, Jack Kramer, Vakhtang Chulukhadze, Joshua Campbell, Matteo Rinaldi, Ruochen Lu
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes.
no code implementations • 21 Nov 2023 • Omar Barrera, Sinwoo Cho, Kenny Hyunh, Jack Kramer, Michael Liao, Vakhtang Chulukhadze, Lezli Matto, Mark S. Goorsky, Ruochen Lu
This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3).
no code implementations • 9 Nov 2023 • Omar Barrera, Sinwoo Cho, Jack Kramer, Vakhtang Chulukhadze, Joshua Campbell, Ruochen Lu
In this work, a 38. 7 GHz acoustic wave ladder filter exhibiting insertion loss (IL) of 5. 63 dB and 3-dB fractional bandwidth (FBW) of 17. 6% is demonstrated, pushing the frequency limits of thin-film piezoelectric acoustic filter technology.
no code implementations • 6 Sep 2023 • Sinwoo Cho, Omar Barrera, Pietro Simeoni, Emily N. Marshall, Jack Kramer, Keisuke Motoki, Tzu-Hsuan Hsu, Vakhtang Chulukhadze, Matteo Rinaldi, W. Alan Doolittle, Ruochen Lu
This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN).
no code implementations • 11 Jul 2023 • Jack Kramer, Vakhtang Chulukhadze, Kenny Huynh, Omar Barrera, Michael Liao, Sinwoo Cho, Lezli Matto, Mark S. Goorsky, Ruochen Lu
This work reports a 50. 74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5. 17% resulting in a figure of merit (FoM, Q x k2) of 12. 2.
no code implementations • 10 Jul 2023 • Omar Barrera, Sinwoo Cho, Lezli Matto, Jack Kramer, Kenny Huynh, Vakhtang Chulukhadze, Yen-Wei Chang, Mark S. Goorsky, Ruochen Lu
This work reports an acoustic filter at 23. 5 GHz with a low insertion loss (IL) of 2. 38 dB and a 3-dB fractional bandwidth (FBW) of 18. 2%, significantly surpassing the state-of-the-art.