no code implementations • 6 Sep 2023 • Sinwoo Cho, Omar Barrera, Pietro Simeoni, Emily N. Marshall, Jack Kramer, Keisuke Motoki, Tzu-Hsuan Hsu, Vakhtang Chulukhadze, Matteo Rinaldi, W. Alan Doolittle, Ruochen Lu
This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN).