C-Band Lithium Niobate on Silicon Carbide SAW Resonator with Figure-of-Merit of 124 at 6.5 GHz

no code implementations • 26 Feb 2024 • Tzu-Hsuan Hsu, Joshua Campbell, Jack Kramer, Sinwoo Cho, Ming-Huang Li, Ruochen Lu

In this work, we demonstrate a C-band shear-horizontal surface acoustic wave (SH-SAW) resonator with high electromechanical coupling (keff2) of 22% and a quality factor (Q) of 565 based on a thin-film lithium niobate (LN) on silicon carbide (SiC) platform, featuring an excellent figure-of-merit (FoM = keff2*Q ) of 124 at 6. 5 GHz, the highest FoM reported in this frequency range.

Thin-film Lithium Niobate on Insulator Surface Acoustic Wave Devices for 6G Centimeter Bands

no code implementations • 18 Feb 2024 • Tzu-Hsuan Hsu, Joshua Campbell, Jack Kramer, Sinwoo Cho, Zhi-Qiang Lee, Ming-Huang Li, Ruochen Lu

The optimized LNOI SH-SAW with a {\lambda} of 400 nm exhibits a fs of 9. 05 GHz, a keff2 of 15%, Qmax of 213 and a FoM of 32, which indicates a successful implementation for device targeting centimeter bands.

Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride

no code implementations • 6 Sep 2023 • Sinwoo Cho, Omar Barrera, Pietro Simeoni, Emily N. Marshall, Jack Kramer, Keisuke Motoki, Tzu-Hsuan Hsu, Vakhtang Chulukhadze, Matteo Rinaldi, W. Alan Doolittle, Ruochen Lu

This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN).

X-Ray Diffraction (XRD)